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Ultrafast Optics and Application (UFO-NK)

Ultrafast Optics and Application    Facilities    Excimer Laser
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Excimer Laser

Excimer Laser_Compex205 System

Compex205 System

Wavelength

248nm

Pulse Energy

750 mJ

Max. Rep. Rate

50Hz

Average Power

33W

Energy Stability(1 sigma)

≤0.75 %

Pulse Duration(FWHM)

25 ns

Beam Dimensions(V×H, FWHM)

24×10 mm2

Beam Divergence(V×H, FWHM)

≤3×1mrad2

Beam Pointing Stability(1 sigma)

≤50rad

Cooling

Water

Weight

350Kg

Electrical

230V±10%, 16A