Pulsed Laser Deposition

Pulsed Laser Deposition

Observation window

1x DN 100CF, 1x DN 63CF

Laser incident window

1x DN 63CF

Sample stage

2Inch

Target stage

1Inch

Heater

~800℃

Vacuum degree

~5*10-8 mbar

Molecular pump outlet

1x DN 160CF

Front vent

1x DN 40CF

Bypass vent

1x DN 40CF

Vacuum gauge

~10-9mbar

Quick opening interface

1x DN 100CF

Gas inlet

2x DN 16CF

Pulsed Laser Deposition

观察窗

1x DN 100CF, 1x DN 63CF

激光入射

1x DN 63CF

样品台

2Inch

靶台

1Inch

加热器

~800℃

真空度

~5*10-8 mbar

分子泵抽气口

1x DN 160CF

前级抽气口

1x DN 40CF

旁路抽气口

1x DN 40CF

真空计

~10-9mbar

快开门接口

1x DN 100CF

气体入口

2x DN 16CF